Micromachines as Tools for Nanotechnology formatIsbn:Softcover - 9783642624650 1 mu and gate thicknesses

1 mu and gate thicknesses of <3 nm will be required in the near future

A story founded on fact

which is able to cover the weak points of the latter

der Forschung und Entwicklung (FuE) findet derzeit ein Strukturwandel statt

Ist für die Zukunft von einem beschäftigungslosen Wachstum auszugehen

Micromachines as Tools for Nanotechnology formatIsbn:Softcover - 9783642624650 1 mu and gate thicknessesThis book addresses the use of MEMS (micro electro mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano objects. The book covers state of the art MEMS and NEMS devices for DNA molecular handling